3D beam plot from <i>LEXEL™</i> 95-SHG S-path laser

The LEXEL™ 95-SHG laser has a very high-quality TEM00 beam.

Info on this page:
Wavelength and Power
Beam Parameters
Operational and Dimensional

Info on other pages:
85/95 General Overview
85/95 Specification Charts
85 SHG Overview
95 SHG Overview

ColorPro Overview
All Lasers Overview

Tech Info on other pages:

How gas-ion lasers work
     Laser wavelength charts

LEXEL™Laser Features:
  Laser head
          Plasma tube
Optical resonator
Power supply
Power supply interior
Single-freq. operation
Model 503 Etalon
Typical freq. stability


<i>LEXEL™</i> 95-SHG laser beam profile - click for enlarged view

These two charts show the LEXEL™ 95-SHG's high-quality vertical and horizontal beam profile. The profile is plotted at distances from 5 to 130 cm away from the laser's exit aperture. To see a large version of this, click on the graphic above. 


The LEXEL™ 95-SHG gas-ion laser provides continuous-wave deep ultraviolet coherent laser light with up to 250mW output. (For lower power output in a more compact laser, see our 85-SHG model.) The 95-SHG laser is based on the proven LEXEL™ 95 series.

The 95-SHG is an intracavity frequency-doubled system equipped with a nonlinear BBO crystal, to produce Second Harmonic Generation (SHG) deep UV coherent laser light. It uses the simplest, most stable three-mirror folded cavity design for frequency doubling. This provides two benefits:

   > True hands-free laser operation in the ultraviolet.
A high-quality TEM00 beam that's suitable even for highly mode-sensitive applications.

Deep UV Applications

The 95-SHG is designed for long, stable life in a variety of scientific and industrial applications needing coherent deep UV laser light.

  Scientific applications

  Industrial applications

> Optical Fiber Bragg Grating (FBG)
> Resonance Raman spectroscopy
   light source

> Microscopy light source
> Capillary electrophoresis (CE)
> Protein science (protein folding, protein
   secondary structure)
  > Interferometric optic testing
> Semiconductor photolithography
> Semiconductor reticle inspection
> Semiconductor wafer testing
> Semiconductor surface
> Raman spectroscopy


The BBO crystal (Beta Barium Borate: BaB2O4) is mounted on either a Manual Micrometer Stage or an optional Crystal Automatic Transition (CAT) Stage. The CAT stage provides true hands-free operation for industrial applications, by eliminating the need for BBO crystal tune-up.

A continuous supply of dry nitrogen is required when the system is operating.

Custom laser wavelengths, other than the standard ones shown below, are available. Contact LEXEL™ Lasers with your requirements.


Visible wavelength1 Output power, mW SHG wavelength2 Output power, mW
568.2 nm 225 284 nm 10
528.7 nm 420 264 nm 10
514.5 nm 2400 257 nm 200
501.7 nm 480 250 nm 10
496.5 nm 750 248 nm 30
488.0 nm 1800 244 nm 100
476.5 nm 720 238 nm 10
457.9 nm 420 229 nm 10
1 Single line operation. Some wavelengths require special optics.
2 One SHG wavelength per BBO crystal.



  514nm wavelength 257nm wavelength
Mode TEM00 TEM00
Beam diameter3 ≤ 1.5 mm .6 x .7 mm
Beam divergence (full angle) ≤ 0.6 mrad .7 x 1.3 mrad
Beam polarization Horizontal Vertical
Power stability4 (light control) 0.2% 1 %
3 Beam diameter measured at the front of output coupler
4 After one hour warm-up



Electrical service requirements 208VAC, 3 phase Wye or Delta
50A, 50/60 Hz
Cooling water flow 2.2 gpm at 20-70 psi
(8.5 liter/min at 1.4-4.9 Kg/cm
Cooling water source Filtered tap water
Incoming water temperature 50-90 F (10-35 C)
Non-condensing environment
N2 flow rate 1 liter/min, 0.3 - 0.5 psi
Laser head, L x W x H
Click here for dimensional drawing
53.5 x 7.2 x 5.8 inches
(135.9 x 18.3 x 15 cm)
Power supply,
depth x W x H
19.3 x 16.6 x 10.8 inches
(48.9 x 42.2 x 27.4 inches)
Laser head, weight Uncrated: 85 lbs (39 kg)
Crated: 126 lbs (57 kg)
Power supply, weight Uncrated: 125 lbs (57 kg)
Crated: 144 lbs (65 kg)

Specifications as of 5/2003. Subject to change without notice.

Power supply, head and tube

The LEXEL™ 95-SHG laser is CDRH-certified with all safety features. It comes with a two-year/2,000 hour warranty on the system (excluding the BBO crystal). The BBO crystal for a CAT stage is warranted for 1 year or 1000 hours, whichever comes first; for a manual stage crystal, the warranty is 90 days.

Power supply
power supply front panel contains all controls necessary to operate and fully monitor the laser system.

    > Linear low noise power supply
    > Current and light regulation 0-10V
       external modulation
> Panel mounted power meter
> Automatic starting Remote turn-on capability

Laser head
Within the
laser head, an ultra-stable solid Invar optical resonator holds the plasma tube and mirrors in precise alignment to produce deep UV coherent laser light.

> Solid Invar resonator
> Temperature-compensated prism
   wavelength selector
> Fine tuning capability
Multiline mirror holder for all lines operation

Laser tube
A simple and reliable
plasma tube design. LEXEL™'s solid ceramic plasma tube design has been proven since 1972, while other ion laser manufacturers have tried and abandoned several designs in an attempt to match LEXEL™'s stability and performance. In fact, a majority of the more than 18,000 LEXEL™ plasma tubes still operate today, some with over 20,000 hours use.

> Sealed intracavity spaces Free-flow
   gas supply
> High-efficiency solid ceramic plasma tube

Standard features

Current and light regulation
The LEXEL™ 95-SHG laser can be operated in current or UV light control:

>   Current regulation allows direct control of the current through the plasma tube via an external source.

>   UV light regulation provides the ultimate in UV laser output stabilization. A small portion of the UV light is sampled within the laser and compared to a reference signal in a differential circuit that automatically adjust the laser current to maintain a constant output.  This feature also allows for the UV light level to be modulated externally with a 10 volt signal.

Fine tuning
The laser is aligned accurately with the use of fine tuning knobs.

Remote turn on
This feature permits the laser power supply to be turned on and off and the plasma tube to be started remotely.

Automatic starting
This circuit automatically starts the plasma tube approximately 20 seconds after the power supply is turned on.

Panel-mounted power meter
This multirange power meter continuously displays the output power of the laser.

Optional features

Resonator Cavity Stabilization System

Crystal Automatic Translation (CAT)

Model 503-S Temperature Controlled Etalon Assembly
The extremely stable 503-S etalon assembly allows single longitudinal mode operation, for applications requiring long coherence length and very narrow line width. The output power is typically in the range of 50% of the original output.

Model BBO-95-"x" BBO Crystal with Housing
This replacement BBO crystal with special coating is optimized at "x", which is 257, 244, 229 or 284 nanometers. Each crystal is assembled with a temperature-controlled housing unit and is ready for installation into a 95-SHG series system.

Initial Installation and Hands-On Training
One-day on-site installation and hands-on training for 95-SHG series within the U.S. and Canada.


N2 Nitrogen Generator
This custom-designed nitrogen generator can produce nitrogen at 99.9995% purity! This is particularly useful for uninterrupted, unattended operation of 95-SHG with CAT feature. To learn more, click here for more detailed information and photos.

Model 507 Adapter

An adapter threads into the 3/4"-32 optical thread at the output aperture of the laser converting it to a 1-32 female thread for mounting optical accessories with this larger size thread.

Model 508 Remote Power Monitor
A power monitor operates in conjunction with the option 7507 panel-mounted power meter to allow continuous monitoring of the laser power at locations away from the power supply. This is strongly recommended for a Manual Micrometer Stage system.


For pricing and availability, call or email us.



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