HIGHER-POWER DEEP UV GAS-ION LASER

The Lexel 95-SHG gas-ion laser provides continuous-wave deep ultraviolet coherent laser light with up to 250mW output. (For lower power output in a more compact laser, see our 85-SHG model.) The 95-SHG laser is based on the proven Lexel 95 series. The 95-SHG is an intracavity frequency-doubled system equipped with a nonlinear BBO crystal, to produce Second Harmonic Generation (SHG) deep UV coherent laser light. It uses the simplest, most stable three-mirror folded cavity design for frequency doubling. This provides two benefits:

True hands-free laser operation in the ultraviolet.
A high-quality TEM₀₀ beam that's suitable even for highly mode-sensitive applications.

Deep UV Applications

The 95-SHG is designed for long, stable life in a variety of scientific and industrial applications needing coherent deep UV laser light.

Scientific applications		Industrial applications
Optical Fiber Bragg Grating (FBG) Resonance Raman spectroscopy light source Microscopy light source Capillary electrophoresis (CE) Protein science (protein folding, protein secondary structure)		Interferometric optic testing Semiconductor photolithography Semiconductor reticle inspection Semiconductor wafer testing Semiconductor surface Raman spectroscopy

Specifications

The BBO crystal (Beta Barium Borate: BaB₂O₄) is mounted on either a Manual Micrometer Stage or an optional Crystal Automatic Transition (CAT) Stage. The CAT stage provides true hands-free operation for industrial applications, by eliminating the need for BBO crystal tune-up.

A continuous supply of dry nitrogen is required when the system is operating.

Custom laser wavelengths, other than the standard ones shown below, are available. Contact Cambridge Lasers with your requirements.

LEXEL 95-SHG WAVELENGTH AND POWER
Visible wavelength¹	Output power, mW	SHG wavelength²	Output power, mW
568.2 nm	225	284 nm	10
528.7 nm	420	264 nm	10
514.5 nm	2400	257 nm	200
501.7 nm	480	250 nm	10
496.5 nm	750	248 nm	30
488.0 nm	1800	244 nm	100
476.5 nm	720	238 nm	10
457.9 nm	420	229 nm	10
¹ Single line operation. Some wavelengths require special optics. ² One SHG wavelength per BBO crystal.

LEXEL 95-SHG BEAM PARAMETERS
	514nm wavelength	257nm wavelength
Mode	TEM₀₀	TEM₀₀
Beam diameter³	≤ 1.5 mm	.6 x .7 mm
Beam divergence (full angle)	≤ 0.6 mrad	.7 x 1.3 mrad
Beam polarization	Horizontal	Vertical
Power stability⁴ (light control)	±0.2%	±1 %
³ Beam diameter measured at the front of output coupler ⁴ After one hour warm-up

LEXEL 95-SHG OPERATIONAL AND DIMENSIONAL
Electrical service requirements	208VAC, 3 phase Wye or Delta 50A, 50/60 Hz
Cooling water flow	2.2 gpm at 20-70 psi (8.5 liter/min at 1.4-4.9 Kg/cm²)
Cooling water source	Filtered tap water
Incoming water temperature	50-90° F (10-35° C) Non-condensing environment
N2 flow rate	1 liter/min, 0.3 - 0.5 psi
Laser head, L x W x H Click here for dimensional drawing	53.5 x 7.2 x 5.8 inches (135.9 x 18.3 x 15 cm)
Power supply, depth x W x H	19.3 x 16.6 x 10.8 inches (48.9 x 42.2 x 27.4 inches)
Laser head, weight	Uncrated: 85 lbs (39 kg) Crated: 126 lbs (57 kg)
Power supply, weight	Uncrated: 125 lbs (57 kg) Crated: 144 lbs (65 kg)
Specifications as of 5/2003. Subject to change without notice.

Power supply, head and tube

The Lexel 95-SHG laser is CDRH-certified with all safety features. It comes with a two-year/2,000 hour warranty on the system (excluding the BBO crystal). The BBO crystal for a CAT stage is warranted for 1 year or 1000 hours, whichever comes first; for a manual stage crystal, the warranty is 90 days.

Power supply
The power supply front panel contains all controls necessary to operate and fully monitor the laser system.

Linear low noise power supply
Current and light regulation
0-10V external modulation

Panel mounted power meter
Automatic starting
Remote turn-on capability

Laser head
Within the laser head, an ultra-stable solid Invar^® optical resonator holds the plasma tube and mirrors in precise alignment to produce deep UV coherent laser light.

Solid Invar^® resonator
Temperature-compensated prism wavelength selector

Fine tuning capability
Multiline mirror holder for all lines operation

Laser tube
A simple and reliable plasma tube design. Lexel's solid ceramic plasma tube design has been proven since 1972, while other ion laser manufacturers have tried and abandoned several designs in an attempt to match Lexel's stability and performance. In fact, a majority of the more than 18,000 Lexel plasma tubes still operate today, some with 20,000 hours use.

Sealed intracavity spaces
Free-flow gas supply

High-efficiency solid ceramic plasma tube

Standard features

Current and light regulation
The Lexel 95-SHG laser can be operated in current or UV light control:

n Current regulation allows direct control of the current through the plasma tube via an external source.

n UV light regulation provides the ultimate in UV laser output stabilization. A small portion of the UV light is sampled within the laser and compared to a reference signal in a differential circuit that automatically adjust the laser current to maintain a constant output.
This feature also allows for the UV light level to be modulated externally with a ± 10 volt signal.

Fine tuning
The laser is aligned accurately with the use of fine tuning knobs.

Remote turn on
This feature permits the laser power supply to be turned on and off and the plasma tube to be started remotely.

Automatic starting
This circuit automatically starts the plasma tube approximately 20 seconds after the power supply is turned on.

Panel-mounted power meter
This multirange power meter continuously displays the output power of the laser.

Optional features

Resonator Cavity Stabilization System

Crystal Automatic Translation (CAT)

Model 503-S Temperature Controlled Etalon Assembly
The extremely stable 503-S etalon assembly allows single longitudinal mode operation, for applications requiring long coherence length and very narrow line width. The output power is typically in the range of 50% of the original output.

Initial Installation and Hands-On Training
One-day on-site installation and hands-on training for 95-SHG series within the U.S. and Canada.

Accessories

Model BBO-95-"x" BBO Crystal with Housing
This replacement BBO crystal with special coating is optimized at "x", which is 257, 244, 229 or 284 nanometers. Each crystal is assembled with a temperature-controlled housing unit and is ready for installation into a 95-SHG series system.

N2 Nitrogen Generator
This custom-designed nitrogen generator can produce nitrogen at 98.5% purity. This is particularly useful for uninterrupted, unattended operation of 95-SHG with CAT feature. The amount of nitrogen can be adjusted between 0.1-1.5 liter/min for optimal performance. The complete system includes a built-in automatic on/off compressor and an inlet air filter.

Model 507 Adapter
An adapter threads into the 3/4"-32 optical thread at the output aperture of the laser converting it to a 1-32 female thread for mounting optical accessories with this larger size thread.

Model 508 Remote Power Monitor
A power monitor operates in conjunction with the option 7507 panel-mounted power meter to allow continuous monitoring of the laser power at locations away from the power supply. This is strongly recommended for a Manual Micrometer Stage system.

Model 7504 Rack-Mounted Power Supply
All Lexel 95-series power supplies can be equipped with a rack mounting panel for mounting in a standard 19"(438mm) equipment cabinet.

Pricing

For pricing and availability, call Cambridge Lasers.

3D beam plot from Lexel 95-SHG S-path laser

The Lexel 95-SHG laser has a very high-quality TEM₀₀ beam.

Info on this page:
Deep UV Applications
Specifications
Power supply, head and tube
Standard features
Optional features
Accessories
Pricing

These two charts show the Lexel 95-SHG's high-quality vertical and horizontal beam profile. The profile is plotted at distances from 5 to 130 cm away from the laser's exit aperture. To see a large version of this, click on the graphic above.